Proton Beam Writing
Contents

Instrumentation

The parts of a proton beam writer, as built for the first working prototype at the Centre for Ion Beam Applications, National University of Singapore.

  1. Accelerators

    The MeV proton source, and the layout of the prototype writer at CIBA.

  2. Focussing systems

    The OM52 lens system that focuses MeV protons to 40 × 40 nm.

  3. End stations

    The chamber and stage where the sample is written.

  4. Software

    Ionscan, the scanning and control software for p-beam writing.