Photo gallery
Slides of structures and devices made by proton beam writing, with references to the published work. Select a slide to see it full size.
Additions 2011
Micro disk resonator and spiral laser cavity written in SU8 resist. 
Silicon microdisk resonators and a waveguide grating in silicon. 
Light guiding in ion-implanted diamond. 
Three-dimensional PMMA microsculptures, visualised by STIM tomography. 
Microstructures in InP semiconductor. 
Microstructures in agar gel for patterned cell growth.
Additions September 2008
Fabrication of a Si micro-turbine using proton beam writing and porous silicon micromachining. More about this 
Proton beam writing in p-type GaAs. 
Micropatterning of Foturan photosensitive glass following exposure to MeV proton beams. 
Rapid deep micromachining of PTFE by MeV ion bombardment in oxygen-rich atmospheres. 
Selective growth of ZnO nanorod arrays on GaN/sapphire using a proton beam written mask.
Gallery September 2007
High aspect ratio test structures in HSQ resist, with walls 22 nm wide. 
High aspect ratio test structures in SU8 resist: 60 nm walls, 10 µm deep. 
3D multilevel structure: the Parthenon in SU8 resist. 
3D multilevel structure: Stonehenge in SU8 resist. 
Prototype interdigitated nano-biosensor with 85 nm gaps. 
A grating written in bulk silicon. 
A ring resonator in a 4 µm layer of SU-8 on silicon. 
Templates for X-ray lenses: Fresnel zone plates. 
Logo on a coin: the NUS logo written into a Singapore dollar. 
Waveguide test structures in SU-8. 
Nickel stamps for nanoimprinting. 
Proton beam molding: from PMMA structure to nickel stamp to PDMS. 
Free-standing silicon waveguides. 
Silicon structuring using proton beam writing. 
The CIBA red dragon, on the cover of Advanced Materials. 
La Musique by Henri Matisse, reproduced in porous silicon. 
Silicon micro-dragon: resonant cavities written in porous silicon. 
Quantum art: the CIBA orchid in silicon. 
An array of nickel pillars, 100 nm across and 400 nm high. 
Metamaterials: a gold split ring resonator array.
